Inductively coupled plasma sources from Plasma ALD, LLC.


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Giyul Ham Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Giyul Ham returned 2 record(s).

NumberTitle
1Moisture Barrier Properties of Al2O3 Films deposited by Remote Plasma Atomic Layer Deposition at Low Temperatures
2Ultra-thin Al2O3 coating on the acid-treated 0.3Li2MnO3ยท0.7LiMn0.60Ni0.25Co0.15O2 electrode for Li-ion batteries