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R. A. Synowicki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. A. Synowicki returned 2 record(s).

NumberTitle
1Atomic layer deposition of LiF using LiN(SiMe3)2 and SF6 plasma
2Atomic layer deposition of aluminum fluoride using Al(CH3)3 and SF6 plasma