Inductively coupled plasma sources from Plasma ALD, LLC.


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Koji Yoshitsugu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Koji Yoshitsugu returned 2 record(s).

NumberTitle
1Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
2Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing