Koji Yoshitsugu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Koji Yoshitsugu returned 2 record(s).

Number	Title
1	Leakage Current Reduction in ALD-Al2O3 Dielectric Deposited on Si by High Pressure Deuterium Oxide Annealing
2	Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition