Inductively coupled plasma sources from Plasma ALD, LLC.


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E. A. Pershina Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. A. Pershina returned 1 record(s).

NumberTitle
1Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate