Yuqing Xiong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yuqing Xiong returned 2 record(s).

Number	Title
1	Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides
2	Electron Cyclotron Resonance Plasma-Assisted Atomic Layer Deposition of Amorphous Al2O3 Thin Films