Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yeong-Yuh Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yeong-Yuh Lee returned 1 record(s).

NumberTitle
1High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds