Inductively coupled plasma sources from Plasma ALD, LLC.


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Anupama Mallikarjunan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anupama Mallikarjunan returned 2 record(s).

NumberTitle
1Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
2Designing high performance precursors for atomic layer deposition of silicon oxide