Lutz Kirste Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Lutz Kirste returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si |
| 2 | Densification of Thin Aluminum Oxide Films by Thermal Treatments |