M. Higashiwaki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M. Higashiwaki returned 3 record(s).

Number	Title
1	Electron channel mobility in silicon-doped Ga₂O₃ MOSFETs with a resistive buffer layer
2	Epitaxially grown crystalline Al₂O₃ interlayer on β-Ga₂O₃ (010) and its suppressed interface state density
3	Field-Plated Ga₂O₃ MOSFETs With a Breakdown Voltage of Over 750 V