Inductively coupled plasma sources from Plasma ALD, LLC.


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Marc J. M. Merkx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc J. M. Merkx returned 2 record(s).

NumberTitle
1Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers
2Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle