Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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C. Fragkiadakis Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by C. Fragkiadakis returned 2 record(s).

NumberTitle
1Effects of radiation and cryogenic temperatures on the electromechanical properties of materials used in microsystems
2Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in Microsystems