Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J. D. Murphy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. D. Murphy returned 1 record(s).

NumberTitle
1Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon