Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Sonja Sioncke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sonja Sioncke returned 2 record(s).

NumberTitle
1Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
2Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates