Sonja Sioncke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sonja Sioncke returned 2 record(s).

Number	Title
1	Interfaces of high-k dielectrics on GaAs: Their common features and the relationship with Fermi level pinning
2	Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates