Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Stefano Dallorto Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stefano Dallorto returned 2 record(s).

NumberTitle
1Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
2Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses