Seungjun Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seungjun Lee returned 3 record(s).

Number	Title
1	The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
2	Characteristics of Atomic-Layer-Deposited HfO₂ Films by Using a Remote Plasma on Pre-Deposited Hf Metal Layer
3	Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition