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Masaaki Matsukuma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Masaaki Matsukuma returned 3 record(s).

NumberTitle
1Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors
2Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO2) plasma enhanced atomic layer deposition (PEALD) processes
3Atomic layer epitaxy of Si using atomic H