Inductively coupled plasma sources from Plasma ALD, LLC.


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P. Shao Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Shao returned 1 record(s).

NumberTitle
1Post Plasma Oxidation Processed ALD Al2O3/Hf1-xZrxO2 Thin Films on Ge Substrates: Reliability