G. X. Liu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by G. X. Liu returned 3 record(s).

Number	Title
1	Electrical properties of Ga₂O₃-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
2	Growth Temperature Dependence of TiO₂ Thin Films Prepared by Using Plasma-Enhanced Atomic Layer Deposition Method
3	Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition