Inductively coupled plasma sources from Plasma ALD, LLC.


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Chien-Jung Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chien-Jung Huang returned 2 record(s).

NumberTitle
1Chemical Reaction and Ion Bombardment Effects of Plasma Radicals on Optoelectrical Properties of SnO2 Thin Films via Atomic Layer Deposition
2Effect of plasma power on the structural properties of tin oxide prepared by plasma-enhanced atomic layer deposition