Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Yun Yong Nam Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yun Yong Nam returned 2 record(s).

NumberTitle
1Effect of Hydrogen in Gate Insulator on NBIS Performance of Oxide Thin Film Transistor
2Oxide Vertical TFTs for the Application to the Ultra High Resolution Display