Travis J. Anderson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Travis J. Anderson returned 4 record(s).

Number	Title
1	ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
2	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
3	Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
4	Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy