Zheng Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zheng Chen returned 2 record(s).

Number	Title
1	Low-temperature remote plasma enhanced atomic layer deposition of ZrO₂/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes
2	The Cut-Off Phenomenon Effect on ZrO₂ Growth Using Remote Plasma-Enhanced Atomic Layer Deposition