Inductively coupled plasma sources from Plasma ALD, LLC.


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Seung Chan Heo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Seung Chan Heo returned 1 record(s).

NumberTitle
1Remote plasma atomic layer deposited Al2O3 4H-SiC MOS capacitor with remote H2 plasma passivation and post metallization annealing