Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Yuichiro Ezoe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yuichiro Ezoe returned 1 record(s).

NumberTitle
1Enhanced X-ray reflectivity from Pt-coated silicon micropore optics prepared by plasma atomic layer deposition