Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Wen-Hui Tang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wen-Hui Tang returned 1 record(s).

NumberTitle
1Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition