Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Mathieu Halbwax Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mathieu Halbwax returned 1 record(s).

NumberTitle
1Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches