Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Tyler Kent Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tyler Kent returned 1 record(s).

NumberTitle
1The influence of surface preparation on low temperature HfO2 ALD on InGaAs (001) and (110) surfaces