Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

R. Thewes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by R. Thewes returned 1 record(s).

NumberTitle
1Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications