Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Ayuta Suzuki Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ayuta Suzuki returned 1 record(s).

NumberTitle
1Surface oxidation model in plasma enhanced atomic layer deposition for silicon oxide films including various aminosilane precursors