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Iosif E. Clemente Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Iosif E. Clemente returned 2 record(s).

NumberTitle
1Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
2Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN