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P. Fazan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Fazan returned 2 record(s).

NumberTitle
1Understanding the EOT-Jg degradation in Ru/SrTiOx/Ru metal-insulator-metal capacitors formed with Ru atomic layer deposition
2Understanding and optimizing the floating body retention in FDSOI UTBOX