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Luchana L. Yusup Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Luchana L. Yusup returned 2 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using a Novel Silylamine Precursor
2Reactivity of different surface sites with silicon chlorides during atomic layer deposition of silicon nitride