Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Ji-eun Jeong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ji-eun Jeong returned 2 record(s).

NumberTitle
1Effect of plasma and heat treatment on silicon dioxide films by plasma-enhanced atomic layer deposition
2Growth behavior and film properties of titanium dioxide by plasma-enhanced atomic layer deposition with discrete feeding method