Taewook Nam Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Taewook Nam returned 3 record(s).

Number	Title
1	Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition
2	Low-temperature atomic layer deposition of TiO₂, Al₂O₃,and ZnO thin films
3	Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors