Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Anthony Lochtefeld Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Anthony Lochtefeld returned 2 record(s).

NumberTitle
1Enhanced surface passivation of epitaxially grown emitters for high-efficiency ultrathin crystalline Si solar cells
2Advanced surface passivation of epitaxial boron emitters for high-efficiency ultrathin crystalline silicon solar cells