Atsushi Ogura Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Atsushi Ogura returned 4 record(s).

Number	Title
1	Correlation between ferroelectricity and ferroelectric orthorhombic phase of Hf_xZr_1-xO₂ thin films using synchrotron x-ray analysis
2	Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
3	Improvement of smooth surface of RuO₂ bottom electrode on Al₂O₃ buffer layer and characteristics of RuO₂/TiO₂/Al₂O₃/TiO₂/RuO₂ capacitors
4	Influence of Al₂O₃ layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors