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C. Lavoie Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by C. Lavoie returned 3 record(s).

NumberTitle
1The physical properties of cubic plasma-enhanced atomic layer deposition TaN films
2The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties
3Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition