Brianna S. Eller Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Brianna S. Eller returned 2 record(s).

Number	Title
1	Comparison of AlF₃ thin films grown by thermal and plasma enhanced atomic layer deposition
2	Characterization of plasma-enhanced atomic layer deposition of Al₂O₃ using dimethylaluminum isopropoxide