Franziska Naumann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Franziska Naumann returned 9 record(s).

Number	Title
1	Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
2	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
3	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
4	Long-term ambient surface oxidation of titanium oxynitride films prepared by plasma-enhanced atomic layer deposition: An XPS study
5	In situ real-time and ex situ spectroscopic analysis of Al2O3 films prepared by plasma enhanced atomic layer deposition
6	Analysis of nitrogen species in titanium oxynitride ALD films
7	Comparison of plasma-enhanced atomic layer deposition AlN films prepared with different plasma sources
8	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
9	In-gap states in titanium dioxide and oxynitride atomic layer deposited films