Fei-Bing Xiong Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Fei-Bing Xiong returned 1 record(s).
| Number | Title |
|---|---|
| 1 | Surface Passivation of Silicon Using HfO2 Thin Films Deposited by Remote Plasma Atomic Layer Deposition System |