Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Petri Johansson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Petri Johansson returned 1 record(s).

NumberTitle
1Low temperature temporal and spatial atomic layer deposition of TiO2 films