Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

H.A. Bórbon-Nuñez Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H.A. Bórbon-Nuñez returned 1 record(s).

NumberTitle
1ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies