Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Chang-Wook Jeong Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang-Wook Jeong returned 1 record(s).

NumberTitle
1Growth and characterization of aluminum oxide films by plasma-assisted atomic layer deposition