Zonghoon Lee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Zonghoon Lee returned 4 record(s).

Number	Title
1	Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition
2	Very high frequency plasma reactant for atomic layer deposition
3	In situ surface cleaning on a Ge substrate using TMA and MgCp₂ for HfO₂-based gate oxides
4	Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer