Kevin Voon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kevin Voon returned 3 record(s).

Number	Title
1	Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
2	Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
3	Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN