Daming Wei Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Daming Wei returned 2 record(s).

Number	Title
1	Atomic layer deposition TiO₂-Al₂O₃ stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors
2	Influence of Atomic Layer Deposition Temperatures on TiO₂/n-Si MOS Capacitor