Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Nicole E. Lay Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nicole E. Lay returned 1 record(s).

NumberTitle
1Direct Plating of Cu on Pd Plasma Enhanced Atomic Layer Deposition Coated TaN Barrier