Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Ni Ren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ni Ren returned 1 record(s).

NumberTitle
1Atomic layer deposition of copper thin film and feasibility of deposition on inner walls of waveguides