Wen-Kuan Yeh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wen-Kuan Yeh returned 3 record(s).

Number	Title
1	Incorporating Yttrium into a GeO Interfacial Layer with HfO2-Based Gate Stack on Ge
2	AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition
3	Improving Thermal Stability and Interface State Density of High-k Stacks by Incorporating Hf into an Interfacial Layer on p-Germanium