Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Rohan P. Chaukulkar Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rohan P. Chaukulkar returned 2 record(s).

NumberTitle
1Low temperature hydrogen plasma-assisted atomic layer deposition of copper studied using in situ infrared reflection absorption spectroscopy
2Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors